Indexation 661.68 : Sillicium et ses composés
661 Produits chimiquesOuvrages de la bibliothèque en indexation 661.68 (1)
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Klaus Graff, Auteur | Berlin ; London ; New York : Springer | Springer series in Materials science | 1999Metal Impurities in Silicon-Device Fabrication treats the transition-metal impurities generated during the fabrication of silicon samples and devices. The different mechanisms responsible for contamination are discussed, and a survey is given[...]
