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CMOS hotplate chemical microsensors / Graf, Markus

Public ISBD Titre : CMOS hotplate chemical microsensors Type de document : document électronique Auteurs : Graf, Markus, Auteur ; Barrettino, Diego, Auteur ; Baltes, Henry, Auteur Editeur : Berlin : Springer Année de publication : 2007 Collection : Microtechnology and MEMS ISBN/ISSN/EAN : 978-3-540-69562-2 Langues : Anglais (eng) Mots-clés : CMOS  -  Chemical  sensor  -  Control  architectures  -  Integrated  systems  -  Microsensors Résumé : This is the first comprehensive document on microhotplate-based chemical sensor systems in CMOS-technology. It covers all aspects of successful sensor prototyping: theory of transducer modelling, microelectronics design considerations, system design issues, and issues related to system and device microfabrication, packaging, and testing. A variety of different hotplates for different operation conditions is detailed and a family of metal-oxide-covered microhotplate-based microsensor systems with increasing complexity is presented. These systems belong to a new generation of chemical microsensors and represent examples of the successful integration of nanomaterials, microtechnology and microelectronics. The document provides students, scientists and engineers with an accessible introduction to the field of microhotplate-based chemical sensing, with all the necessary fundamental knowledge included. Beyond that, it also provides detailed information on all important issues concerning complex high-performance CMOS chemical microsensor systems; hence it will also be valuable to experts already familiar with the field. Note de contenu : Miniaturized Metal-Oxide Sensors Thermal Modelling of CMOS Microhotplates Microhotplates in CMOS Technology Monolithic Gas Sensor Systems . Microsensor Arrays Conclusionand Outlook CMOS hotplate chemical microsensors [document électronique] / Graf, Markus, Auteur ; Barrettino, Diego, Auteur ; Baltes, Henry, Auteur . - Springer, 2007. - (Microtechnology and MEMS) . ISBN : 978-3-540-69562-2 Langues : Anglais (eng) Mots-clés : CMOS  -  Chemical  sensor  -  Control  architectures  -  Integrated  systems  -  Microsensors Résumé : This is the first comprehensive document on microhotplate-based chemical sensor systems in CMOS-technology. It covers all aspects of successful sensor prototyping: theory of transducer modelling, microelectronics design considerations, system design issues, and issues related to system and device microfabrication, packaging, and testing. A variety of different hotplates for different operation conditions is detailed and a family of metal-oxide-covered microhotplate-based microsensor systems with increasing complexity is presented. These systems belong to a new generation of chemical microsensors and represent examples of the successful integration of nanomaterials, microtechnology and microelectronics. The document provides students, scientists and engineers with an accessible introduction to the field of microhotplate-based chemical sensing, with all the necessary fundamental knowledge included. Beyond that, it also provides detailed information on all important issues concerning complex high-performance CMOS chemical microsensor systems; hence it will also be valuable to experts already familiar with the field. Note de contenu : Miniaturized Metal-Oxide Sensors Thermal Modelling of CMOS Microhotplates Microhotplates in CMOS Technology Monolithic Gas Sensor Systems . Microsensor Arrays Conclusionand Outlook

Exemplaires

Code-barres	Cote	Support	Localisation	Section	Disponibilité	Etat_Exemplaire
E00229	621.382 GRA	Ressources électroniques	Bibliothèque Centrale	Electronique	Disponible
E00230	621.382 GRA	Ressources électroniques	Bibliothèque Centrale	Electronique	Disponible